Onto Innovation (ONTO) CEO pay: $6.5M actually paid in FY2025
$ONTO · ONTO INNOVATION INC.Data through FY2025 — latest proxy filed 2026-04-06, checked for new filings 2026-08-21. Every number links to its source.
1.6× the tracked-company median CEO pay ($3.9M).
Pay vs. Performance (Compensation Actually Paid)
What the CEO was actually paid, by fiscal year
What $100 invested was worth, company vs peer group
Pay-vs-Performance table
| FY | CEO pay on paper | CEO pay actually earned | Other top execs (avg) | Value of $100 invested since FY2020 | Same, peer group since FY2020 | Net income |
|---|---|---|---|---|---|---|
| 2025 | $7.8M | $6.5M | $4.0M | $331.78 | $268.22 | $136.8M |
| 2024 | $7.0M | $10.1M | $1.9M | $355.84 | $187.31 | $201.7M |
| 2023 | $5.6M | $21.2M | $2.8M | $318.23 | $138.72 | $121.2M |
| 2022 | $5.3M | $2.1M | $711,974 | $86.27 | $42.94 | $223.3M |
| 2021 | $5.1M | $14.0M | $2.1M | $176.97 | $119.51 | $142.3M |
| 2020 | $3.8M | $4.5M | $1.5M | $30.11 | $53.66 | $31.0M |
Frequently asked
How much did the ONTO CEO make in 2025?
$6,491,709 in Compensation Actually Paid (CAP) as ONTO INNOVATION INC.'s CEO (the filing reports this year's PEO pay without tagging which named executive it belongs to), updated 2026-04-06.
What is pay vs. performance (PvP)?
An SEC disclosure (Item 402(v), required since FY2022) linking named-executive pay to company total shareholder return (TSR) over up to 5 years.
What is Compensation Actually Paid (CAP)?
CAP starts from the Summary Compensation Table total and adjusts equity awards to fair value as of each year-end/vesting date, rather than grant-date value — see the glossary entry for the full walk-through.
Also on ONTO: SEC & DOJ enforcement actions · CEO track-record ranking · Glossary